v10 Chapter 1404： UV light source lithography machine (2/2)

”Well, Professor Li, let me tell you to see if there is any improvement.” Lin Qinglan nodded and said with a smile: ”This time we mainly improved the light wave frequency of the lithography machine, as well as the optical lens and Align the system and other parts. Under ideal circumstances, once the transformation is successful, this infrared lithography machine can be smoothly transformed into an ultraviolet lithography machine, and its accuracy can be greatly improved...”

Infrared light source is one of the first generation products of asml company. However, with the increasing demand for chips, infrared light source burning can no longer meet the needs of the manufacturing industry. Then comes the ultraviolet light source, which has higher energy and can be extremely Greatly improve the accuracy of burning.

Due to the international blockade, let alone an ultraviolet light source, even an infrared light source lithography machine is an extremely rare object in China.

An ultraviolet light source lithography machine, this is something Li Xueqian can't even think of.

”Professor Lin, can we really have our own UV light source lithography machine?” Li Xueqian endured the excitement in his heart and cautiously asked.

”If my assumption is correct, I think it is.” Upon hearing this, Lin Qinglan nodded.

As the chief researcher of asml, he has worked in asml for 6 years and participated in the iterative work of all products of asml.

For every detail of the upgrade and transformation of the lithography machine, he is already thoroughly familiar with it.

If her plan is correct, the upgrade should go smoothly.

”Thank you, thank you Professor Lin, Huaxia will remember your contribution.” Li Xueqian said excitedly.

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